Overall equipment effectiveness on-line categories system and method6256550Abstract A manufacturing control and reporting method/system for manufacture of semiconductor devices comprises a system for loading a mechanical article handling device in a semiconductor manufacturing system, provides an automatic check-in and changing equipment status to an UP status, automatically checking whether the article handling system is empty, and for automatically changing the system status to an IDLE status. The system provides automatic check-in, and subsequent to processing of the workload by the plant provides track-out followed by automatically checking whether the article handling system is empty. Then the system checking whether a TE has arrived, and the system checks whether the TE has reloaded the article handling system. Claims Having thus described the invention, what is claimed as new and desirable to be secured by Letters Patent is as follows: Description BACKGROUND OF THE INVENTION
Definitions
OEE: Overall Equipment Effectiveness
EQP: Equipment
UP: Equipment process (productive)
BKUP: Equipment process (productive) time, but
production is allocated to another module or
fab causing a BacKUP in this module or fab.
TE: Technical Employee: EQP Operator
NO TE: EQP is in standby time due to unavailability
UNLOAD/LOAD: of TE (operator) to load/unload wafers.
(IDLE):
WIP: Work In Process.
NO WIP LOAD: EQP standby time due to no Wafers.
(WIP=) in production.
LOST OTHERS: EQP standby time due to the fact that
downstream equipment is down or because of
waiting for a full batch of Wafers.
WAIT PM: Time of EQP WAITing for equipment engineer to
perform, Preventive Maintenance
WAIT ENG: Time EQP waiting for troubleshooting by
equipment/process ENGineer
WAIT OCAP: Time of EQP waiting due to Out of Control for
Action Procedure (SPC)
WAIT OTHERS: Time of EQP waiting for anything else.
Casette: Container for Semiconductor Wafers to be used
in automatic material handling for
manufacturing process.
POD: Container for Cassettes filled with
semiconductor wafers.
TEST: Engineering time
MFGHOLD: Force chamber to be down due to another
chamber down in Cluster tool
(Multi-chamber EQP) = EQ another chamber up
Turn to: This has no meaning for OEE (just for
another type: accounting purposes)
PM: time of preventive maintenance
MON: time of confirming EQP is workable
DOWN: Hardware-related downtime.
FAC: Facilities-related downtime.
OFF: Shutdown (non-scheduled time).
track in: Interface sends information to shop floor
control system when operator loads lot
into production.
track out: Interface sends information to shop floor
control system when operator removes lot
from production.
SAM: Interface (Smart Arm Master)
Rework Qty: Quantity of work to be REWORKed.
Scrap Qty: Scrap quantity.
Track in Qty: Quantity of lots loaded into system.
T_WPH: Theoretical throughput measured-Wafers/Hour.
PROMIS: Data Processing System for Shopfloor control
system
SMIF: Standard Mechanical InterFace article
handling device system and system as in
U.S. Pat. No. 5,669,508, commonly assigned,
of Chen-Chin Chen and Kuei-Lung Chou for
"Pod Carrier Function Expansion by Adding a
Fixture" and U.S. Pat. No. 5,611,452 of
Bonora et al. for "Sealable Transportable
Container Having Improved Liner"
SMIF arm: Interface hardware for operator to
load/unload wafers into and from SMIF
Eff. Efficiency
AV. Availability
In the current state of the art, the current situation is as follows: 1. OEE (Overall Equipment Effectiveness) is the percentage of time that the equipment is being used to produce wafers that are going to be shipped to a customer. 2. Weakness of current situation: 2.1 UP time can't stand for actual effectiveness of EQP: 2.1.1 After TRACK OUT, EQP status is still "UP" 2.1.2 Losses due to EQP idle are not included. 2.1.3 Losses due to scrap and rework are not included. 2.2 Can't trace productivity: Definition of EQP status (e.g. UP, WAIT, LOST) is not sufficient. 3. There is a trend to adoption of OEE in semiconductor manufacturing. 1. OEE Formula in accordance with this invention.
##STR1## (1)
##STR2## (2)
##STR3## (3)
##STR4## (4)
##STR5## (5)
##STR6## (6)
1.5 Demand Efficiency = 1 (7)
1.6 IDLE : auto-count EQP waiting for TE 1.7 Rework & Scrap Qty: the invalid production is possibly caused by: 1.7.1 Upstream processing due to no quality inspection point between previous workstation and current workstation. 1.7.2 Downstream processing and ever processed by current workstation. 1.7.3 Current workstation 2. Data Categories
Availability (AVLBLTY)
Performance Efficiency
Rate Efficiency
Operating Efficiency
Rate of Quality
Demand Efficiency
PRODUCTIVE UP
TIME BKUP
STANDBY LOST
NOTE UNLOAD
LOAD
NO WIP LOAD
LOST OTHERS
WAIT
WAIT PM
WAIT ENG
WAIT OCAP
WAIT OTHERS
ENGINEERING TEST
SCHEDULED MFG HOLD
DOWNTIME EO Another Chamber UP
Turn to Another type
PM
MON
UNSCHEDULED DOWN
DOWNTIME FAC
NON-SCHEDULE OFF
3. Up/BKUP Comparison
up
before OEE
pod arrives -->load cassette-->procees-->unload cassette -->pod
remove-->pod arrive --
after OEE
up idle(NO_TE)
4. EQP Status Transition Flowchart Referring to FIG. 1, a flowchart is shown of a computer program in accordance with this invention which is resident in factory control computer system 70 which is a part of the overall computer system 50 starts in block 10 and leads to block 12, where the TE (Technical Employee: EQP Operator) puts the pod on the SMIF arm (of the article handling device.) Block 12 is an "AUTO change" phase of operation of the system as indicated by block 40, which begins the UP/BKUP phase of the operation of the system wherein computer automated materials handling and processing commences under control of the factory control computer system 70 in FIG. 2. Next, in step 14, "automatic check-in" of the work loaded into the automated manufacturing plant occurs under control of factory control computer system 70. Then the factory operates to perform the functions include in block 16 comprising the steps as follows: Load Process Start Process Process Complete Unload Next, the system proceeds to block 18 which is the "track-out" function in which the interface sends information to shop floor control system 87 in FIG. 2, when the operator removes a lot from production. Block 18 is another "AUTO change" phase of operation of the system as indicated by block 42, which ends the UP/BKUP phase of the operation of the system wherein computer automated materials handling and processing commences under control of the computer system 70 in FIG. 2. Block 42 also designates the beginning of the IDLE: NO TE phase 44 of operation of the system. In block 20 Auto check whether the SMIF arm is empty. In block 22 removes the pod from the SMIF arm. In decision block 24, the system 70 determines whether the TE has arrived based upon an input provided by the TE to the system 50. Then the system calls for the TE to remove the pod from the SMIF arm, so the SMIF arm is empty. This marks the end of the IDLE: NO TE phase 44 of operation of the system. In block 24, the factory control system 70 checks to determine whether the TE has arrived? If YES, then the system goes on to test blocks 26 and 28. If NO, then as indicated by line 38 the result is that the system goes to block 28 as described below. In block 26, the factory control system 70 checks the shop floor 87 to determine whether the TE put the next pod on the SMIF arm? If NO, the block 26 loops back to block 24 to determine whether the TE has arrived? If YES, the program loops back to block 12 and commences the process for another pod. This represents another "AUTO change" as indicated by block 48. Block 46 indicates a "TE change" phase of operation of the system at the input of block 28. In block 28, the factory control system 70 determines whether a TE check for WIP has indicated whether there was any WIP found? If YES, there is WIP, the block 30 a report of the "LOSS: Others Next Down or Full Batch" function is performed by the system 70. As stated above, LOST OTHERS is defined as a condition in which EQuipment (EQP) is waiting during a standby time period due to the fact that downstream equipment is down or because of waiting for a full batch of Wafers. Then the system goes on to block 34. If NO WIP in block 28, the factory control system 70 the LOSS: NO WIP Load function is performed by the system 70 and the program goes on to block 34. In block 34, the system generates a call for a check as to whether the TE has put the next pod on the SMIF arm? After block 34, line test 26, the system loops back to block 12. FIG. 2 shows the computer system 50 employed to control a fabrication plant in accordance with the present invention. System 50 includes a central computer system 60 which comprises a CPU 61, a terminal 67 with monitor 62 and keyboard 63 connected to the CPU 61 or receiving/sending data respectively from/to the CPU 61. A random access memory 65 and a DASD 64 associated with the CPU 61 are shown connected for bidirectional communication with CPU 61. Line 76 connects from CPU 61 to line 176 which connects through the interface of factory control computer 70 through line 276 to CPU 71 of computer 70 which is in a fabrication plant 90. The factory control computer system 70 comprises a CPU 71, a terminal 77 with monitor 72 and keyboard 73 connected to the CPU 71 for receiving/sending data respectively from/to the CPU 71. A random access memory 75 and a DASD 74 associated with the CPU 71 are shown connected for bidirectional communication with CPU 71. Line 86 connects from CPU 71 to line 186 which connects through the interface of factory control computer 70 out to the shop floor 87 elements of the system. FIG. 3 is a chart showing a control system for operating a system considered before reaching the system shown in FIG. 4. In FIG. 3, the operator performs the four steps as follows:
Operator Event
1. Operator put pod 1. Lot auto-tracking
on SMIF arm Auto recipe setting
2. Change PROMIS EQP
status to UP by
manual operation.
2. Start to auto-load cassette
3. Auto-load cassette complete
Processing begins
4. Processing ends
Start to auto-unload cassette.
Auto trackout
5. Auto-unload cassette complete
3. Operator removes pod.
4. Change another EQP
status (if operator
remembers to change).
The PROMIS, SAM, and EQPS information is tracked alongside the above entries in FIG. 3. FIG. 4 is a chart showing a control system for operating a system in accordance with the system of this invention, as follows:
Operator Event
1. Operator puts pod 1. Lot auto-trackin Auto
on SMIF arm recipe setting
2. Start to auto-load cassette
Auto-change PROMIS equipment
status to UP by SAM
3. Auto-load cassette complete Bid
Load Processing begin
4. Processing end
Start to auto-unload cassette
Auto trackout
5. Auto-unload cassette complete
Auto-change PROMIS equipment
status to IDLE by SAM
2. Operator remove pod Change another equipment status
The PROMIS, SAM, and EQPS information is tracked alongside the above entries in FIG. 4. It can be seen that in the chart shown in FIG. 4, there are only two operator functions, which is two less operator 5 functions. In addition, there is an Auto-change of PROMIS equipment status to the UP status in event 2 and to the IDLE status in event 5 with the SAM (Smart Arm Master) interface. In addition, it can be seen by the bold arrow line from SAM to PROMIS that the system changes the equipment status to UP after event 2; and that PROMIS sends back a concurrence message that the request from SAM has been granted (approved.) After event 5, the SAM system sends a change equipment to the IDLE status. FIG. 5 shows a computer screen of an OEE Reporting System operated upon a personal computer based system employed in controlling the systems of FIGS. 1 and 2. FIG. 6 shows another computer screen of the OEE Reporting System which provides an "OEE Report help to trace productivity. The screen has the data as follows:
OEE
Function Time: 11-Jun-1997 7:20:00 -
27-Jun-1997 7:20:00
MET1 MET10 MET11 MET12 MET2 MET3
MET4 MET5 MET6 MET7 MET8 MET9 AVG
Overall Equipment 71.98 93.53 77.26 59.10 69.86 74.81
58.78 72.25 73.40 70.61 69.73 81.41 72.73
Effectiveness (OEE)
Availability 82.28 86.52 88.39 76.62 85.23 83.69
65.38 78.90 75.38 80.00 77.80 80.97 80.10
Performance Efficiency 88.14 108.40 88.55 77.22 82.68 90.02
90.37 92.57 97.93 89.00 89.86 101.37 91.34
Rate Efficiency 105.03 112.97 96.49 85.89 91.30 96.73
109.15 96.64 102.77 95.23 97.35 105.70 99.60
Operation Efficiency 83.92 95.95 91.76 89.91 90.56 93.06
82.80 95.79 95.30 93.46 92.31 95.91 91.73
Rate of Quality 99.26 99.73 98.72 99.89 99.14 99.30
99.49 98.92 99.43 99.17 99.73 99.18 99.33
Demand Efficiency 100.00 100.00 100.00 100.00 100.00 100.00
100.00 100.00 100.00 100.00 100.00 100.00 100.00
PRODUCT- UP 69.05 83.02 81.11 68.89 77.19 77.88
54.13 75.58 71.83 74.77 71.82 77.65 73.58
IVE
TIME BKUP 0.00 0.00 0.00 0.00 0.00 0.00
0.00 0.00 0.00 0.00 0.00 0.00 0.00
ENGINEER- TEST 4.67 0.00 0.66 0.18 0.04 0.00
7.52 0.00 0.55 0.00 0.06 0.00 1.14
ING
STANDBY LOS
WAIT
NO TE 2.70 3.23 5.21 5.07 4.19 3.27
2.71 1.90 2.46 4.49 4.93 2.36 3.54
NO WIP 0.80 0.00 0.00 0.30 0.00 0.00
0.00 0.04 0.00 0.00 0.00 0.00 0.10
LOAD
LOST 5.06 0.27 1.42 2.19 3.82 2.53
1.01 1.37 0.54 0.74 0.99 0.95 1.74
OTHERS
WAIT PM 0.00 0.00 0.00 0.00 0.00 0.00
0.00 0.00 0.00 0.00 0.04 0.06 0.01
WAIT 2.03 0.85 1.00 2.49 0.48 1.29
1.26 2.19 1.92 4.43 2.05 1.92 1.83
ENG
WAIT 0.26 0.00 0.00 0.00 0.00 0.00
0.28 0.39 0.04 0.00 0.14 0.16 0.11
OCAP
WAIT 5.26 4.23 2.42 3.35 3.86 4.39
1.64 3.18 2.67 6.42 2.18 3.72 3.61
OTHERS
SCHED- MH
ULED EQ 0.00 0.00 0.00 0.00 0.00 0.00
0.00 0.00 0.00 0.00 0.00 0.00 0.00
DOWN- OTHER
TIME CHAM
TURN 0.00 0.00 0.00 0.00 0.00 0.00
0.00 0.00 0.00 0.00 0.00 0.00 0.00
OTHER
TYP
PM 3.48 3.33 2.07 3.01 3.52 3.90
9.34 6.29 9.03 4.40 5.90 5.45 4.98
MON 4.72 5.26 5.88 5.43 6.14 5.00
7.94 6.53 4.91 4.94 6.96 5.90 5.80
UNSCHED- DOWN 0.88 0.28 1.33 5.38 0.00 1.82
14.32 2.09 3.11 0.42 4.83 0.87 2.94
ULED FAC 1.33 0.45 0.55 4.49 0.81 0.80
0.00 0.25 2.78 0.99 2.70 0.96 1.34
DOWN-
TIME
NON- OFF 0.00 0.00 0.00 0.00 0.00 0.00
0.00 0.00 0.00 0.00 0.00 0.00 0.00
SCHEDULE
F1 EQP Micr... Graphics Serve Microsoft PM 01-33 OEE
FIG. 7 shows another computer screen of the OEE Reporting System which provides a histogram of on the computer screen which facilitates realization of the difference between EQPS. FIG. 8 shows another computer screen of the OEE Reporting System which provides a computer screen which has the data as follows:
"EFF & WPH Subsystem"
help to know average actual WPH, standard WPH & EQP
WPH *WPH: Wafers per hour
Efficiency
Function Time:- 27-Jun-1997 7:20:00 - 13-Jul-1997
7:20:00 Day/ShiftA
MET1 MET10 MET11 MET12 MET2 MET3 MET4
MET5 MET6 MET7 MET8 MET9 AVG/SUM
MOVE 1101 1342 920 886 1176 1159 1067
1130 903 1031 973 878 12566
EQ_WPH 17.69 16.15 13.54 14.60 15.32 14.56 15.31
13.51 15.75 15.47 15.20 15.97 15.26
ACT_WPH 16.62 15.43 12.87 13.88 14.93 14.07 14.97
12.98 15.38 15.09 14.77 15.10 14.67
STD_WPH 14.07 12.16 11.79 13.69 14.19 13.85 13.62
12.20 11.09 14.17 12.37 12.89 13.01
T_WPH 16.55 14.31 13.87 16.10 16.69 16.29 16.02
14.36 13.04 16.67 14.55 15.16 15.30
ACT_EFF 1.00 1.08 0.93 0.86 0.69 0.86 0.93
0.90 1.18 0.90 1.02 1.00 0.96
STD_EFF 0.85 0.85 0.85 0.85 0.85 0.85 0.85
0.85 0.85 0.85 0.65 0.85 0.85
NOR_EFF 1.18 1.27 1.09 1.01 1.05 1.02 1.10
1.06 1.39 1.06 1.19 1.17 1.13
En F1_EQP - M1... Microsoft Pc,... Graphics Server Microsof Wo.. Efficiency
PM 0153
FIG. 9 shows another computer screen of the OEE Reporting System which provides a computer screen which has the data as follows: "Best WPH Subsystem" help to find improvement opportunity of EQP & recipe setting
Function
Time: 25 JUL-1997 07:20:00 - 07-AUG-1997
07:20:00
MET-1 MET-10 MET-11 MET-12
MET-2 MET-3 MET-4
RECPID WPH GAP WPH GAP WPH GAP WPH GAP
WPH GAP WPH GAP WPH GAP
1161 19.299 0 18.239 1.060 17.447 1.852
16.612 2.687 17.572 1.727 17.577 1.722
1262 19.113 0 18.155 0.958 17.987 1.126 17.442 1.671
116.603 2.51 17.55 1.563 17.608 1.505
2146 14.857 0
2154 15.149 0.582 15.137 0.594
13.996 1.735 15.731 0.000 14.817 0.914
2246
2255
2256 15.060 2.180 14.948 2.292 14.519 2.721
14.576 2.664 14.576 2.664 14.579 2.661
2260
2266 14.904 0
3152 15.163 4.220 15.101 4.282
3153
3154
3252 15.109 0.121 15.054 0.176
3253
3254
3353
3354 18.026 0.000
3356 15.023 0.000 14.881 0.142
3366 18.072 0.001 17.899 0.174
Two monthly reports follow with the second showing the advantages of the system of FIGS. 1, 2, and 4-9 in accordance with this invention.
M/C Efficiency Monthly Report
M/C Efficiency Monthly Report:
from 30-APR-1997 19:20:00 to 31-MAY-1997 19:20:00
Report G
LOCATION EQPTYPE EQPID MOVE ACT WPH STD WPH T WPH
ACT EFF STD EFF NOR EFF
BDRY-MET BMET-1-A 8428 16.1 14.4 16.9
0.9536 0.8500 1.1219
BMET-10A 8070 13.9 11.9 14.1
0.9858 0.8500 1.1598
BMET-11A 7940 14.2 12.3 14.5
0.9794 0.8500 1.1522
BMET-2-A 8235 14.1 14.4 16.9
0.8322 0.8500 0.9791
BMET-3-A 9304 14.8 14.1 16.6
0.8961 0.8500 1.0530
BMET-4-A 78S9 15.2 13.0 15.2
0.9995 0.8500 1.1759
BMET-4-D 24 11.0 14.4 17.0
0.0024 0.8500 0.0028
BMET-5-A 8495 14.0 13.6 16.1
0.8691 0.8500 1.0225
BMET-6-A 8812 14.0 13.3 15.6
0.8961 0.8500 1.0542
BMET-7-A 8657 14.3 13.4 15.8
0.9039 0.8500 1.0634
BMET-8-A 7492 14.9 13.2 15.6
0.9610 0.8500 1.1306
BMET-9-A 8386 14.5 12.4 14.6
0.9983 0.8500 1.1745
***AUG. 91703 13.3 13.2 15.6
0.8526 0.8500 1.0031
While this invention has been described in terms of the above specific embodiment(s), those skilled in the art will recognize that the invention can be practiced with modifications within the spirit and scope of the appended claims, i.e. that changes can be made in form and detail, without departing from the spirit and scope of the invention. Accordingly all such changes come within the purview of the present invention and the invention encompasses the subject matter of the claims which follow.
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